VGRP-UM

Calibration artifact, 180nm step height, 10µm pitch. This Bruker Surface Topography Reference Dies for daily monitoring of SPM performance. The silicon die with patterned layer of SiO is coated with Pt. All die are 8mm x 8mm and unmounted. They are not certified or traceable to NIST. Replaces model STR10-1800P.