PFDT2500
Description
High aspect ratio probe for repeatable, accurate depth metrology and imaging on challenging structures such as deep trenches and pits, as encountered on semiconductor samples and optics. Designed for PeakForce Tapping operation on Dimension Icon. 2500nm tall spike with 30nm end radius and 150nm base width.
Quantity = 5 per pack
Technical Data
-
Key specification
Nom Min Max Tip Radius (nm): 30 Frequency (KHz): 130 100 160 Spring Constant (N/m): 0.4 0.2 0.6 Length (um): 60 55 65 Width (um): 30 27 33 Cantilever Thickness (um): 500 470 530 Reflex Coating: Reflective Aluminum Geometry: Special Tip Specification
Nom Min Max Tip Height (h): 5.5 3 8 Front Angle (FA): 15 13 17 Back Angle (BA): 25 23 27 Side Angle (SA): 17.5 15.5 19.5