PFDT750
Description
High aspect ratio probe for repeatable, accurate depth metrology and imaging on challenging structures such as deep trenches and pits, as encountered on semiconductor samples and optics. Designed for PeakForce Tapping operation on Dimension Icon. 750nm tall spike with 10nm end radius and 65nm base width.
Quantity = 5 per pack
Technical Data
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Key specification
Nom Min Max Tip Radius (nm): 10 Frequency (KHz): 130 100 160 Spring Constant (N/m): 0.4 0.2 0.6 Length (um): 60 55 65 Width (um): 30 27 33 Cantilever Thickness (um): 0.5 0.47 0.53 Reflex Coating: Reflective Aluminum Geometry: Special Tip Specification
Nom Min Max Tip Height (h): 5.5 3 8 Front Angle (FA): 15 13 17 Back Angle (BA): 25 23 27 Side Angle (SA): 17.5 15.5 19.5