TESPA-HAR
Description
42N/m, 320kHz, High Aspect Ratio Tip (5:1), Aluminum Reflective Coating High aspect ratio (HAR) probes are based upon Bruker technology and made from Bruker TESP probes using focused ion beam milling techniques. The HAR process modifies the top portion of the tip to an aspect ratio of at least 5:1. These probes are ideal for Tappingmode imaging on samples with tall/deep geometries, such as semiconductor trench imaging.
Quantity = 10 per pack
Technical Data
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Key specification
Nom Min Max Tip Radius (nm): 10 15 Frequency (KHz): 320 230 410 Spring Constant (N/m): 42 20 80 Length (um): 125 110 140 Width (um): 40 30 50 Cantilever Thickness (um): 4 3.25 4.75 Cantilever Material: Si Reflex Coating: Reflective Aluminum Geometry: Rectangular Tip Specification
Nom Min Max Tip Height (h): 12.5 10 15 Front Angle (FA): 5 4 6 Back Angle (BA): 5 4 6 Side Angle (SA): 5 4 6

